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Electron Beam evaporator

The electron beam causes atoms from the target to transform into the gaseous phase.

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Plasma Enhance Chemical Vapour Deposition (PECVD)

Lower temperature processes compared to conventional CVD

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SPTS UETCH HF Release Etching

Reduced pressure, elevated temperature

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Molecular Vapour Deposition (MVD)

MVD is a unique method for the vapour deposition of functionalized organic molecules that are used for modifying surfaces properties

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Advanced Multidisciplinary MEMS-Based Integrated Electronic NCER Centre of Excellence (AMBIENCE)
School of Microelectronic Engineering,
Universiti Malaysia Perlis (UniMAP),
SME Bank Industrial Estate, 02000 Kuala Perlis,
Perlis.

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