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Electron Beam evaporator

The electron beam causes atoms from the target to transform into the gaseous phase.

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Plasma Enhance Chemical Vapour Deposition (PECVD)

Lower temperature processes compared to conventional CVD

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SPTS UETCH HF Release Etching

Reduced pressure, elevated temperature

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Molecular Vapour Deposition (MVD)

MVD is a unique method for the vapour deposition of functionalized organic molecules that are used for modifying surfaces properties

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PROCESS

TOOLS

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R&D PRODUCT

 

Automated Silicon Wet Etch System   

 

       

 

 

   Agriculture Surveillance Hydroponic Paddy

 

 

 

    Ultra Low Cost Automotive Passenger Safety system Trainer  

 

 

 

The Shoe Insole Using FPGA Implementation

             

      

 MEMS Pressure Sensor 

 

 

Cantilever for Energy Harvesting

 

                                                                            

  Wireless Shoe In-sole System for   Biomedical and Biometric applications 

 

 

Microcantilever produced by laser micromachine tool

 

                                       

                    

 Piezoresistive Accelerometer MEMS Sensor 

   

 

 

Glass-based Microcantilever Formation By Laser Micromachining

            

                                   

       

  Array Microcantilever (top and back side of the samples) 

            

                                  

 

 

Intelligent Wireless Tire Pressure Monitoring System (TPMS) 

     

 

 

 Halalan Toiyiban Chicken Cleaning for Poultry Processing  

 

 

Halalan Toiyiban Basket Cleaning for Poultry Processing   

 

                           

 

      Automated Bird, Rat, and Pig Repellent System 

          

                  

 

Piezoresistive Accelerometer Sensor

 

Piezoresistor Mask & Fabrication Structured by Micromaching 

 

 

Design of Compact Low Pass Filter In Microstrip / MEMS Technology

 

 

 

Piezoresistor model

 

 

 

Microchannel

 

 

 

  SAMPLE : RapidX 250 Laser Micromachining

  - Fabricate microcantilever

              

              

                                   contilever 1                                                 contilever 2

 

 

 

 SAMPLE : RapidX 250 Laser Micromachining

 - Fabricate microcantilever

                

                  cantilever 1 : width ~ 40um                                    cantilever 2 : width ~ 40um

    cantilever 3 : width ~ 20um

 

 

 

 SAMPLE : Molecular Vapour Deposition (MVD)

 -Deposit hydrophobic layer on silicon wafer

                  

 SAMPLE : Rectangular arrayed Microcantilever

 

NO

LENGTH

(μm)

WIDTH

(μm)

GAP (μm)

1

998.63

144.53

512.33

2

845.21

93.84

513.70

3

698.63

71.92

512.33

4

546.58

47.95

512.33

 

 

 SAMPLE : Triangular arrayed Microcantilever

 

NO

LENGTH

(μm)

WIDTH

(μm)

GAP (μm)

1

998.63

142.47

498.63

2

846.58

89.73

500.00

3

701.37

65.75

500.00

4

550.68

46.27

500.00

 SAMPLE : Double-Legged arrayed Microcantilever

 

NO

LENGTH

(μm)

WIDTH

(μm)

GAP (μm)

1

997.26

144.53

505.48

2

849.32

94.52

502.74

3

697.26

71.92

502.74

4

546.58

45.21

502.74

 

 

 

 

 

 

 

 

DASAR PRIVASI

POLISI KESELAMATAN

PENAFIAN

HAKCIPTA

Advanced Multidisciplinary MEMS-Based Integrated Electronic NCER Centre of Excellence (AMBIENCE) School of Microelectronic Engineering, Universiti Malaysia Perlis (UniMAP), SME Bank Industrial Estate, 02000 Kuala Perlis, Perlis.

Tel: +604-9854724 

 

 

           

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