Equipments

List of equipments available at AMBIENCE

 

No.

Equipment

Description

Picture

 

1

 

RapidX 250 Laser Micromachining

 

The rapid prototype tool is used for  micro fabrication of MEMS devices

 

 

 

2

 

HF Release uEtch

 

The uEtch is used to isotropically etch Silicon Dioxide (SiO2)

 

 

 

3

 

Electron Beam Vacuum Coating System

 

 

The E-Beam Evaporator is used to coat thin film metal layers

  

 

 

 

4

 

Fume hood, glove box and wetbench

 

All of these items are used for chemical preparation

 

 

 

 

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Advanced Multidisciplinary MEMS-Based Integrated Electronic NCER Centre of Excellence (AMBIENCE)
School of Microelectronic Engineering,
Universiti Malaysia Perlis (UniMAP),
SME Bank Industrial Estate, 02000 Kuala Perlis,
Perlis.

Tel: +604-9854724