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Electron Beam evaporator

The electron beam causes atoms from the target to transform into the gaseous phase.

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Plasma Enhance Chemical Vapour Deposition (PECVD)

Lower temperature processes compared to conventional CVD

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SPTS UETCH HF Release Etching

Reduced pressure, elevated temperature

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Molecular Vapour Deposition (MVD)

MVD is a unique method for the vapour deposition of functionalized organic molecules that are used for modifying surfaces properties

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  • Advanced Multidisciplinary MEMS-Based Integrated Electronics NCER Centre Of Excellence

  • Industry funded MEMS laboratory in Malaysia for advanced MEMS research and training activities for the academia and industry.

  • Begin as SNUCOE involves Silterra, Altera, NCIA and UniMAP investment of RM15 million

  • Located at UniMAP SME Bank Complex in Kuala Perlis & now expanded at Anjung UniMAP Kulim, Kedah

  • Main facility completed in end of December 2014.

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Advanced Multidisciplinary MEMS-Based Integrated Electronic NCER Centre of Excellence (AMBIENCE)
School of Microelectronic Engineering,
Universiti Malaysia Perlis (UniMAP),
SME Bank Industrial Estate, 02000 Kuala Perlis,
Perlis.

Tel: +604-9854724 

 

 

           

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