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ADVANCED HYDROPHOBIC NANOLAYER FOR MEMS APPLICATION

~ Service Price RM 200/hour

sample

Handphone only

Handphone + MVD

Hydrophobic Nano Layer

ADVANTAGE

1.  Low thermal damage (low temperature process)
2. Process control through automation
3. Excellent production  repeatability
4.  Demonstrated large yield increase
5. Demonstrated product enablement
6. Safe operation
7. Applicable to many materials
8. High precision
9.  Low cost
10.  Only 2 MVD machines in Malaysia

MEMS STRUCTURE REALIZATION USING KRF EXCIMER LASER MICROMACHINING

~ Service Price RM 0.01/firing

sample:

Piezoresistor mask & fabrication structured by micromachining

ADVANTAGES

1.  Appropriate cost
2. Can design a micro size in short period of time
3.   Environmental friendly
4.  Less chemical usage especially in etching process
5. Reduce the number of mask involves
6. Applicable to many materials
7.  Highly flexible CNC programming  
8.  High precision (tolerance ± 1um)
9.  Low thermal damage

APPLICATION OF ADVANCED ANHYDROUS HF BASED SACRIFICIAL SIO2 REMOVAL TOWARDS ANTI-STICTION MEMS REALIZATION

~ Service Price RM 200/hour

sample

Sample 1:   Etch/Remove oxide layer on silicon wafer

ADVANTAGE

1. Know how to optimize Silterra HF vapor release process recipe.
2. Realization of MEMS structure on Silterra CMOS substrate
3. Can etch sacrificial SiO2 and other films
4. Eliminates stiction – dry vapour process, repeatable, controlled
5. Reduce pressure & elevated pressure
6. Fast process & low cost
7. Compatible with many metals/typical MEMS materials (Al)
8. The graduate intern can be absorbed as the worker of the collaborating organization
9. Recognition to the academician